High Performance RF Engineering
Our Products
At Kengineering, we offer a range of high-performance RF power supplies, matching networks, and process control modules designed for semiconductor, industrial, and research applications. Our products are engineered for efficiency, reliability, and cost-effectiveness, ensuring optimal performance in even the most demanding environments.
RF Power Supplies
RF-300
300W Solid-State ISM Band RF Power Supply
A cost-effective, air-cooled 300W RF power supply operating at 13.56 MHz for industrial, semiconductor, and research applications.
Features:
- Universal input power (90-240VAC)
- Simple analog control (DB-15 or DB-25 interface)
- Available in embedded or standalone configurations
Benefits:
- Lightweight (16.6 lbs)
- Cost-effective
- High reliability (<0.5% AFR, 2-year warranty)
Applications:
Semiconductor, industrial, and R&D OEM systems
RF-600
600W Solid-State ISM Band RF Power Supply
A compact, 600W RF power supply with a high-efficiency design, perfect for semiconductor and industrial applications.
Features:
- Universal input power (90-240VAC)
- Simple analog control (DB-15 interface)
- Embedded or standalone configurations
- Small form factor for space-limited setups
Benefits:
- Lightweight (15.25lbs)
- Compact (6.8” x 5.2” x 19.5”)
- Cost-effective
- High reliability
Applications:
Semiconductor, industrial, and R&D OEM systems
RF Matching Networks
FastMatch 1
FM-1: Low-Cost Air-Capacitor RF Matching Network
A reliable, self-contained matching network with microprocessor-based control, designed for a wide range of plasma applications.
Features:
- 24VDC power operation
- Automatic POST (power-on self-test)
- DC bias readback & position feedback options
Benefits:
Low maintenance, easy installation
High reliability (3-year warranty)
Configurable for specific applications
Applications:
Replacement for obsolete matching units, OEM semiconductor & industrial plasma systems
FastMatch 4
FM-4: Standard-Form Air-Capacitor RF Matching Network
A versatile and cost-effective air-capacitor matching network designed for plasma applications up to 500W.
Features:
Universal input power (90-240VAC)
Microprocessor-based control
Remote DC bias readback & position feedback
Benefits:
Standard AMAT-compatible form factor
Easily tailored to specific impedances
Lower cost than vacuum capacitor networks
Applications:
New OEM plasma systems, industrial & semiconductor applications
FastMatch 7
FM-7 – High-Power Vacuum Capacitor RF Matching Network
A robust vacuum capacitor matching network for high-power semiconductor and industrial applications.
Features:
Microprocessor-controlled stepper motor adjustment
Network or serial control & readback options
Supports input power from 30W to over 1KW
Benefits:
High accuracy & repeatability
AMAT-compatible standard form factor
Extreme durability for demanding environments
Applications:
High-power OEM plasma systems, semiconductor & industrial applications
Specialized Equipment
LF300B
300W Low-Frequency Generator
A 100 kHz RF generator designed for AutoGlows and small plasma systems, ideal for embedded applications.
Applications:
Applications: Integrated use in plasma systems like AG300 and similar setups
Process Control Module (PCM)
Standalone Plasma System Controller
A fully integrated plasma process control module, designed for new OEM systems and retrofit applications.A robust vacuum capacitor matching network for high-power semiconductor and industrial applications.
Features:
- Universal input power (90-240VAC)
- Industrial touchscreen interface
- Genesis software on Linux hardware
- Process monitoring & data logging
- Safety monitoring (pressure, pneumatic, door/operator interlocks)
- Full plasma chamber control
- Pumping & venting
- pressure control with baratron monitoring
- Gas flow management (up to 6 MFCs)
- RF power control (1 or 2 generator
Benefits:
- Easily serviceable & upgradeable
- Modular software & hardware for flexibility
- Compatible with current regulatory-approved systems
Applications:
- Replacement for discontinued control systems
- Modular solution for OEM R&D and industrial applications
- Deployed in semiconductor, aerospace, industrial, and medical industries
Why Choose Kengineering?
✔ Industry-Leading Expertise – Decades of experience in semiconductor & industrial RF systems
✔ Reliable & Cost-Effective – High-quality solutions designed for long-term performance
✔ Custom Engineering Available – We tailor solutions to meet your specific application needs
🚀 Upgrade Your Equipment Today! Contact us to learn more about how our products can optimize your system’s performance.