Kengineering Services
Generator
Services
At Kengineering Technical Services (KTS), we specialize in the repair, refurbishment, and replacement of RF generators used in semiconductor, optics, industrial, and research applications. With our extensive database of OEM documentation, large parts inventory, and expert engineering team, we provide fast, reliable, and high-quality service for a wide range of RF generators.

Expert RF Generator Repair & Support
Our experience in servicing and repairing generators from leading manufacturers such as ENI, Advanced Energy, and Comdel has given us unique insight into generator design and performance optimization. This expertise has allowed us to develop specialized testing systems and replacement parts for many popular but aging models, ensuring extended equipment life even when OEM support is no longer available.
We Service & Repair Generators From:
✅ ENI/MKS – OEM B and ACG Series (3, 6, and 10)
✅ Advanced Energy – RFG3000, RFG5500, RFX-600, RF-600, PE Series Low Frequency
✅ Comdel – CX-600 and select other models
Comprehensive Generator Services
OEM Generator Repair & Parts Replacement
We maintain a large inventory of legacy and new parts to ensure that your generators remain operational long after OEM support has ended.
Advanced Energy RFG3000 & RFG5500
Replacement driver/exciter modules and tank filters
PE-Series Low Frequency Generators
Extensive service experience and spare parts
ENI OEM B & ACG (3, 6, 10) Series
Available stock of used units for resale
Comdel CX-600
Repairs and maintenance
“Twilight” Design Support – Extending the Life of Legacy Equipment
We specialize in supporting older RF generators and match networks that are no longer serviced by the OEMs but remain critical in production.
Trazar AMU10D-2 Match Networks
Replacements designed by KTS
RF Services RFS500/700 Matches
Ongoing service and replacement options
KTS-Designed Replacement Generators
For aging and unsupported generators, we offer form, fit, and function replacement solutions that eliminate the need for process requalification.
Our replacement generators are carefully engineered to match the original designs, with upgraded key components for enhanced longevity and reliability.
LF-10K
Replacement for PE-II 10K generators used in PCB applications
RF-600
Replacement for Advanced Energy RFX-600, ENI ACG-6 and others
RF-300
Replacement for Tegal RF generators
Why Choose Kengineering?
✔ Specialized RF Expertise – Years of experience servicing leading RF generator brands
✔ OEM & Legacy Equipment Support – We repair, replace, and upgrade generators no longer supported by the manufacturer
✔ Extensive Parts Inventory – Large stock of OEM and KTS-designed replacement parts for rapid service
✔ Fast, Reliable Service – Quick turnaround times without compromising on quality
✔ Custom Engineering Solutions – Designed to meet your specific application needs
Get Your RF Generator Running Like New
If you need repairs, refurbishment, or a replacement generator, Kengineering has the experience, inventory, and technology to keep your systems running at peak efficiency.
📞 Contact us today for a no-obligation consultation and find the best solution for your RF generator needs.
